GENERIC STANDARDS OF ASML MATERIALS &

TREATMENTS
ANODIZING

GSA 08 2410
Keywords: anodizing, anodic oxide coatings, aluminum, aluminum alloys, protective coating

1 Scope
This standard describes the requirements for anodic oxide coatings on aluminum and its
alloys, for protective purposes. The requirements for hard anodic oxide coatings are not
described in this standard.

Acknowledged competence: Chemical & Materials analysis.

2 General
General requirements and instructions on cleanliness and packaging are specified in TPD of
the involved part and in the “Handbook for ASML Suppliers”.

3 Terms and definitions

Term Definition
TPD Technical Product Documentation
Hot sealing Sealing process performed at elevated temperatures (> 95 °C), in which
sealing of the surface is achieved by the formation of boehmite (AlO(OH)).
Cold sealing Sealing process performed at temperatures < 50 °C, in which sealing of the
surface is achieved by the formation of (mainly) fluorides.

4 Subject
The application of anodic oxide coatings on aluminum and its alloys should occur according
to any of the referenced international standards (see paragraph 5). With regard to process
conditions and final properties, ASML uses the following additional specifications.

4.1 Additional process parameters

• sealing (either hot or cold) is compulsory, unless otherwise specified, i.e. [NOT SEALED].
• if [COLD] is specified, temperatures during all the anodization process (including e.g.
cleaning and pre-treatment) should not exceed 50 °C. Cold sealing should be applied.
• if [DIMENSION STABLE] is specified, special care should be taken to meet the specified
critical dimensions and tolerances on drawing. This is a joint responsibility of the coating
supplier and the machining company.
• final rinse should be in de-ionized water of low conductivity (≤ 10 µS/cm).

Status: UCC Superseded: TBI 12 5205 dd: 2004-11-26 Page 1 of 3

Last update: 2005-11-24
Revision: 01
 GENERIC STANDARDS OF ASML MATERIALS &
TREATMENTS
ANODIZING

GSA 08 2410

4.2 Additionally required properties of the finished product

The list below is a list of minimum requirements. Compliance with the referenced MIL
standard will warrant meeting those requirements. Compliance with MIL (which is
more demanding than necessary for ASML) is not mandatory; compliance with either ISO or
ASTM and taking into account this GSA, will suffice.

• dimensions and tolerances as specified on drawing

• colorless (unless otherwise specified)
• no visible stains or scratches
• uniform, good adherence
• no blisters
• wear resistance
• upon rubbing with a dry cloth, no particle formation should occur (“white-glove test”)
• protection against corrosion
• a coating of specified thickness, visual quality, and adherence is bound to have a
sufficient corrosion resistance for use in ASML tools

4.3 Description on drawing

The designation on drawing for anodic oxide coatings includes indications for:
• the type of coating: [ANOD]
• coating thickness, including the allowed tolerances, in µm: [XX+/-Yµm]
• the color of the coating, if specified, e.g.: [BLACK]
• any additional requirement. Possible requirements are:
• COLD
• DIMENSION STABLE (or DIM. STABLE)
• NOT SEALED
• the standard: [GSA 08 2410]

4.3.1 Example
ANOD 18+/-2mu; BLACK
NOT SEALED (GSA 08 2410)

This means:
ANOD : anodic oxide coating
18+/-2mu : a thickness of 18 µm, with an allowed tolerance of ±2 µm
BLACK : the coating shall be black.
NOT SEALED : the coating shall not be sealed.
(GSA 08 2410) : the coating shall meet the requirements of this ASML standard.

4.4 Anodizing cast aluminum

The anodization of cast aluminum is virtually impossible using general anodizing sequences.
Extra attention should be paid to the quality of the final product. To reach ASML
specifications, a so-called de-smutting procedure could prove necessary.

Status: UCC Superseded: TBI 12 5205 dd: 2004-11-26 Page 2 of 3

Last update: 2005-11-24
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 GENERIC STANDARDS OF ASML MATERIALS &
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ANODIZING

GSA 08 2410

5 References
Title ASML standard (Inter)national Standard
Anodizing of aluminium and its alloys – ISO 7599 (1983)
General specifications for anodic oxide
coatings on aluminium

Standard specification for anodic oxide ASTM B580-79 (2004)

coatings on aluminum

Anodic coatings for aluminum and MIL-A-8625 (1993)

aluminum alloys

Instruction packaging requirements Handbook for ASML

Suppliers

6 Document change & history record

Name Competence Last update Status Revision Comment
MaaH Chemical & Materials 2004-03-19 Draft 00 Creation
analysis
MaaH Chemical & Materials 2004-05-11 Draft 00 Final draft
analysis
MaaH Chemical & Materials 2004-06-28 Draft 00 “Cold” added
analysis
MaaH Chemical & Materials 2004-07-08 Draft 00 1st internal review
analysis
MaaH Chemical & Materials 2004-10-28 Concept 00 Concept for final
analysis review
MaaH Chemical & Materials 2004-11-09 Concept 00 Remark MIL added
analysis
MaaH Chemical & Materials 2005-01-21 Concept 00 Remark castings
analysis added
MaaH Chemical & Materials 2005-05-18 Concept 00 Added GSA number
analysis Minor textual
changes
MaaH Chemical & Materials 2005-10-20 UCC 00 Review done
analysis Minor textual change
NDuc Standardization 2005-11-24 UCC 01 Published in ISAS
HBog

Status: UCC Superseded: TBI 12 5205 dd: 2004-11-26 Page 3 of 3

Last update: 2005-11-24
Revision: 01