Focal Spot Size of Microfocus Tubes
U. Ewert, U. Zscherpel, J. Goebbels, Y. Onel, M. Jechow, K. Bavendiek
Size of Micro Focus Spot
Ewert et al. June 2008
Focal Spot Size of -Focus Tubes EN 12543-5:1999: Revision in 2008 possible! Harmonization with ASTM recommended Old: Test object: sphere or wire cross with diameter between 0,9 bis 1,1mm ( 0,01mm) Focus range 5 bis 300 m New: New test object: duplex wire of EN 462-5 or ASTM 2002. Extended standard for and nano focus tubes below 300 m spot Usage of smaller wire diameters than 1 mm. Detectors: Film, CR, DDA, intensifier with computer, Image processing with profile function with line integration, perpendicular to the wire or sphere direction
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Size of Micro Focus Spot
Ewert et al. June 2008
Principle: edge unsharpness measurement (ASTM-Draft)
Size of Micro Focus Spot
Ewert et al. June 2008
Edge Method: Edge Method:
Round wire
simple adjustment!
Result of modeling: Edge transmission increases the unsharpness in the low intensity range
Edge method for : Micro focus tubes normal tubes
EN 12543-5 EN 12543-4
Size of Micro Focus Spot
Ewert et al. June 2008
EN12543-5: Focus size = 2x (90%-50%) = EF +GH EN12543-5: Focus size = 2x (90%-50%) = EF +GH
Size of Micro Focus Spot
Ewert et al. June 2008
Background
100 90 80 70 Intensity 60 50 40 30 20 10 0 -30 -20 -10 0 mm 10 20 30 Gauss edge Gauss line FWHH 10-90 %
If the focal spot (line distribution) has a shape of a Gaussian distribution, the 10-90 % edge width corresponds to the full width at half height of the profile.
Size of Micro Focus Spot
Ewert et al. June 2008
Background
120
100
80 Intensity Gauss I 60 edge function Gauss II Summ od Gauss I+II 40
Two lines, separated by the full width at half height, show a dip of about 7.3 %.
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0 -30 -20 -10 0 mm 10 20 30
Size of Micro Focus Spot
Ewert et al. June 2008
Background
120
100
80 Intensity Lorentz line 60 Lorentz edge FWHH 10-90 % 40
The Lorentzian distribution is typical for focal spots (line profile) with long range wings of about 50 times the half width at half height. The 10-90 % edge width corresponds to 10 30 % width of the spot line distribution depending on the zero line determination. Typical focal spot line distributions are between Gaussian and Lorentzian.
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0 -30 -20 -10 0 mm 10 20 30
Size of Micro Focus Spot
Ewert et al. June 2008
J. Goebbels, Y. Onel AG-CT 2008-05-09 Measurements for focal spot size measurement Unit I Offset Measurement: average over 100 exposures 1 sec Gain Measurement: average over 100 exposures 1 sec Duplex wire exposures: average over 60 exposures 1 sec 225 kV Micro focus tube PE Detector 2048 x 2048 Pixel (0,2 mm)2 SDD: 1147,5 mm SOD: ca. 10-15 mm , Distance of sample as near as possible in front of the tube window! Magnification about 80. 55 kV 100 A, no filter 3227.his Complete Duplex wire 3228.his 3229.his Element 1D Element 1D vertikal Position
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Size of Micro Focus Spot
Ewert et al. June 2008
Self Calibration to Known Wire Diameter
Software ISee was used inclusive the calibration function. The calibration measure is the 800 m width of the wire 1 of E 2002 IQI
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Size of Micro Focus Spot
Ewert et al. June 2008
Measured Edge Profile is Asymmetrical
7000 6000 5000 grey values 4000 Reihe1 3000 2000 1000 0 0 0,05 0,1 pixel mm 0,15 0,2 0,25
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Ewert et al. June 2008
Spot width: edge profile as taken corresponding the previous slide presentation.
Size of Micro Focus Spot
Fit with Lorentzian and Gaussian unsatisfying 10-90% edge
450
50 m 30 m 30 m 67 m
Measured Lorentz Gauss 50%
2*90-50% edge
400 350 300 Intensity 250 200 150 100 50 0 0 -50 mm 0,05 0,1 0,15
50 % full width 10 % full width
The first derivative of the edge function is the measured line spread function of the focal spot. This corresponds to a slit camera exposure. 0,2 0,25
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Size of Micro Focus Spot
Ewert et al. June 2008
7000 6000
Imax/2 192,5
5000 4000 Reihe1 3000 2000 1000 0 0 0,05 0,1 pixel 0,15 0,2 0,25
Allocation of values between edge profile and line profile not useful. The asymmetry of the measured profile disturbs the allocation considerably.
grey values
450 400 350 300 Intensity 250 200 150 100 50 0 0 -50 mm 0,05 0,1 0,15 0,2 0,25 Measured Lorentz Gauss 50%
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Ewert et al. June 2008
Size of Micro Focus Spot
Inaccuracy: Distance, Left vs. Right Wire
The distance between the duplex wires is 10% less than its diameter.
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Ewert et al. June 2008
Size of Micro Focus Spot
Second measurement with DDA at different day
2*90-50% 33 m
Edge method
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Size of Micro Focus Spot
Ewert et al. June 2008
Second measurement with DDA at different day
2*half width 30 m
Measured at first derivative: line spread function
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Size of Micro Focus Spot
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Measurement with HD-CR (DRR) immediately after DDA-Measurement (HD-IP) 2*90-50% 33 m Edge profile
Edge profile
20 m pixel size
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Size of Micro Focus Spot
Ewert et al. June 2008
Measurement with FujiFilm-CR immediately after DDA-Measurement (IP: UR1) 2*90-50% 32 m
50m pixel size
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Size of Micro Focus Spot
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Asymmetrical spot shape in length direction (vertical)
2*90-50% = 47 m DDA of PE
Higher distance due to long range distribution
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Size of Micro Focus Spot
Ewert et al. June 2008
Asymmetrical spot shape in length direction (vertical)
2*half width = 32 m Less sensitive to asymmetry
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Size of Micro Focus Spot
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Edge transmission when measured with thin wires Measurement possible Measurement after new calibration!
2*90-50% 18 m
Edge transmission
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Size of Micro Focus Spot
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Unit II 100 kV Micro focus tube (Transmission target) CCD Camera + Fiber optic ( 2:1) + GdOS Szintillator Image integration over 20 sec, no corrections SDD: 245,0 mm SOD: ca 3 mm M about 66. 85 kV 90 A, no filters en462.his Element 4D (0,4 mm)
2*90-50 % Wire diameter
6 m 400 m
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Size of Micro Focus Spot
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Conclusion:
Duplex wire EN 462-5 / E 2002 is suitable for the measurement of the focal spot size of micro focus tubes. The limitation to 1 mm wire is not necessary. The standardized method 2*(90%-50%) provides stable values also if edge transmission is observed or focal spots are asymmetrical. The measurement of asymmetric spots with wide wings is considered. The full width at half height of line profiles (calculated as derivative of edge profiles) are almost equal to the edge distribution if calculated by 2*(90%-50%) and close to Gaussian distributions. This applies in many cases for the central part of the spot distribution. Since the method is now applicable with the thin wires of EN 4625 or E 2002 IQI the lower limitation to 5 m is not required anymore.
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Size of Micro Focus Spot
Ewert et al. June 2008
Ende
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Size of Micro Focus Spot
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