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EXL Meso Final

Norman Salmon of Lawrence Berkeley National Lab presents information on meso machining, which bridges microelectromechanical systems (MEMS) and conventional miniature machining between 10 μm and 1mm. Examples are shown of micro milling, drilling, and turning of features down to 40 μm for applications such as micro electrodes, rotary cutting tools, and engine components. Meso machining examples include 10μm gears milled on silicon and microchannels cut on diamond and graphite. The objectives are to develop leading technology in meso machining, assembly, and metrology through tools, workpiece materials, process analysis and partnerships.

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80 views

EXL Meso Final

Norman Salmon of Lawrence Berkeley National Lab presents information on meso machining, which bridges microelectromechanical systems (MEMS) and conventional miniature machining between 10 μm and 1mm. Examples are shown of micro milling, drilling, and turning of features down to 40 μm for applications such as micro electrodes, rotary cutting tools, and engine components. Meso machining examples include 10μm gears milled on silicon and microchannels cut on diamond and graphite. The objectives are to develop leading technology in meso machining, assembly, and metrology through tools, workpiece materials, process analysis and partnerships.

Uploaded by

Nisarga
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PPT, PDF, TXT or read online on Scribd
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Meso Machining

Norman Salmon
Engineering Program Manager
Lawrence Berkeley National Lab
[email protected]
• Meso-scale machining: 10 µm ~ 1mm
bridging the gap between silicon based MEMS
and conventional miniature machining.
miniature meso silicon µ-
machining machining machining

10-3 10-4 10-5 10-6


[m]
Critical dimensions
Micro Milling, Drilling and Turning

Micro Stepper Motor Laminates -


100 Micron Diameter Micro Produced Using 100 Micron
Electrodes Produced for Alexander Diameter Rotary Cutting Tools -
Zholents 2002 AFRD LDRD Holes as small as 40 Microns can Tech Transfer Grant for Empire
be drilled in Stainless Steel - Magnetics FY2002
Shown is a 70 Micron Drill
compared with a Human Hair
Micro Engine 1mm
Components

Micro Rotor Micro Turbine

1mm 1mm
Electroplated RF Electrode

125 micron
Meso-Machining Examples
FIB Milling

10µm gears on silicon 37µm cutting tool

25µm channel on diamond 39µm channel on graphite


• Micro Tooling
– tooling design
– tooling application
– materials
» Diamond tools cut by FIB
» New workpiece materials
– analysis of cutting performance
» Force sensing (MEMS)
» Acoustic emissions

25 micron 10 micron
End Mill End Mill
Long Term Vision

Micro EDM Micro Turning

Laser Cutting Micro Milling


and Welding LBL - MESO
Machining
Lab AFM Nano- Machining
LIGA
Micro Molding &
FIB Micro Wire EDM Casting
Micro Manipulation Stage for Lift-Out
Specimen Preparation with FIB
Nano-Manipulator for the
Molecular Foundry

z
x
120mm
Micro Assembly Station

• MEMS Grippers
• Gripper Changer
• Nanometer resolution
• Haptic Feedback?
Meso machine tool
with in situ metrology

• High Speed 170K RPM


Hydrostatic Spindle
• Sub-Micron Accuracy
• Integrated CMM
Probing, Laser, and
Capacitance
Inspection
Objectives

• Develop Leading Technology


Program in Meso Machining,
Assembly, and Metrology
• Develop Partnerships and
Collaborative efforts that support
and compliment our Technology

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