MEMS AND
NANOTECHNOLOGY
XPS
EDAX
XDS
Electron diffraction
PRESENTED BY:
ANUSHREE GOSWAMI
(BBE-19002)
01
X-RAY
PHOTOELECTRON
SPECTROSCOPY
WHAT ARE X-RAYS and HOW
ARE THEY GENERATED?
X-rays are a form of electromagnetic radiation.
X-rays are generated via interactions of the accelerated
electrons with electrons of tungsten nuclei within the tube
anode.
X-RAY PHOTOELECTRON
SPECTROSCOPY
• X-ray Photoelectron Spectroscopy (XPS) also known as Electron
Spectroscopy for Chemical Analysis (ESCA)
• most widely used surface analysis technique because it can be
applied to a broad range of materials
• provides valuable quantitative and chemical state information from
the surface of the material being studied
• Based on photoelectric effect.
INSTRUMENTATION
Electron energy X-ray
analyzer Neutralizer
Source
Vacuum System Electronic controls
Ar Ion gun
INSTRUMENTATION
WORKING
• X-rays are let to fall on the sample.
• When electrons absorb energy they eject with kinetic energy
• The energy of those ejected electrons is analysed by a
detector and a plot of these energies and relative numbers
of electrons is produced
WORKING
APPLICATION
• elemental composition of the surface
• empirical formula of pure materials
• elements that contaminate a surface
• chemical or electronic state of each element in the surface
• uniformity of elemental composition across the top surface (or line profiling
or mapping)
• uniformity of elemental composition as a function of ion beam etching (or
depth profiling)
ADVANTAGES AND
DISADVANTAGES
Non-destructive analysis XPS uses an ultrahigh
of materials. vacuum chamber
Ability to detect all not an appropriate
elements method for identifying
Little or no sample bulk material substrates.
preparation is required. some samples may
Surface contaminants produce severe charging
are easily removed problems.
02
ENERGY DISPERSIVE X-
RAY ANALYSIS
ENERGY DISPERSIVE X-RAY ANALYSIS
● Energy Dispersive X-Ray Analysis (EDX), referred to as
EDS or EDAX, is an x-ray technique used to identify the
elemental composition of materials.
● EDX systems are attachments to Electron Microscopy
instruments
● analysis consist of spectra showing peaks corresponding to
the elements making up the true composition of the
sample being analysed.
INSTRUMENTATION
01 Electron Beam 02 X-ray detector
Source
Pulse Processor
03 04 Analyser
INSTRUMENTATION
WORKING
● The EDS technique detects x-rays emitted from the sample during bombardment
by an electron beam to characterize the elemental composition of the analyzed
volume.
● When the sample is bombarded by the SEM's electron beam, electrons are
ejected from the atoms comprising the sample's surface.
● The resulting electron vacancies are filled by electrons from a higher state, and
an x-ray is emitted to balance the energy difference between the two electrons'
states.
● The EDS x-ray detector measures the relative abundance of emitted x-rays versus
their energy.
WORKING
APPLICATION
Foreign
material
analysis
Phase
identification Corrosion
and evaluation
distribution
Small
Coating
component
composition
material
analysis
analysis
Rapid
material alloy
identification
03
X-RAY DIFFRACTION
PRINCIPLE AND
APPLICATION
X-RAY DIFFRACTION
• Diffraction is when light bends slightly as it passes around the edge of an object or
encounters an obstacle or aperture.
• The atomic planes of a crystal causes an incident beam of X-rays to interfere with
one another as they come out from the crystal. This phenomenon is called X-ray
diffraction.
• X-ray diffraction, or XRD, is a technique for analyzing the atomic or molecular
structure of materials.
PRINCIPLES OF X-RAY
DIFFRACTION
X-ray diffraction is based on constructive interference of monochromatic
X-rays and a crystalline sample.
Diffraction will only occur if the way the x-rays and substance interact meets the
conditions of Bragg’s law. i.e
The angle of incidence is equal to the angle of scattering, and
The path length difference is equal to an integer number of wavelengths
X-RAY DIFFRACTION
METHOD
METHOD
LAUE METHOD ROTATING CRYSTAL POWDER METHOD
METHOD
APPLICATIONS
Geology
Thin-film
Engineering
coatings
Electronics Biology
Pharmaceuticals Material science
ADVANTAGES AND
DISADVANTAGES
It is a rapid and powerful the sample should be
technique homogeneous.
preparation of a minimal requires access to
sample for analysis standard reference data
Interpreting the resulting Preparation of samples
data is relatively often requires grinding
straightforward them down to a powder
Widely available
04
ELECTRON DIFFRACTION
ELECTRON DIFFRACTION
● Electron diffraction technique utilizes the wave nature of
electron in studying the crystal structure of the sample of
interest in terms of chemical positions and nanoscale’s atomic
positions with high precision.
● The sample requires to be really thin so that it is transparent to
electrons.
● Electrons are accelerated in order to create an electron beam
consisting of high-speed electrons with a short and known
wavelength that is comparable to the spacing in the crystal
structure.
THANK
YOU
ANUSHREE GOSWAMI (BBE-19002)
