SCANNING ELECTRON
MICROSCOPE
(SEM)
- IRAM MEHER
23251A6713
SCANNING ELECTRON MICROSCOPE
• A scanning electron
microscope (SEM) is a type of
electron microscope that produces
images of a sample by scanning the
surface with a focused beam of
electrons.
• Manfred von Ardenne - 1937
The main SEM components include:
1. Electron source (gun): Emit a bright and coherent
stream of electrons that can be defocused onto the sample
by lenses within the column.
2. Anode : The anode accelerates the electrons emitted
from the electron source. It is positively charged to
attract the negatively charged electrons, thereby
increasing their energy and velocity.
3. Condenser Lenses : These are electromagnetic
lenses that focus the beam of electrons into a small,
thin, coherent beam. They help control the size and
intensity of the electron beam.
4. Objective Lens : This lens focuses the electron beam
onto the sample. It is crucial for achieving high
resolution and for magnifying the image of the sample.
5. Scan Coils (X, Y Scan Coils) : - These coils
control the movement of the electron beam across
the sample surface in a raster scan pattern. This
scanning is synchronized with the display system to
form the image.
6. Detectors : Secondary Electron Detector ,
Back-Scattered Electron Detector and X-ray
Detector
7. Amplifier : Amplifies the signals detected by
the detectors. This is necessary to process and
convert the signals into a visual image on the
computer screen.
8. Scan Generator : Controls the scanning of the
electron beam over the sample surface. It
coordinates with the scan coils to ensure precise
movement.
9. Sample Stage : This is where the sample is
placed for examination. It can be moved precisely in
the X, Y, and Z directions (and sometimes rotated) to
position different areas of the sample under the
electron beam.
10. Computer/Display : The computer system
processes the amplified signals from the detectors
and generates images. It also controls the SEM
operation parameters such as beam current,
accelerating voltage, and focus.
OPTICAL MICROSCOPE VS SEM
Advantages:
1. Magnification Range
2. Versatile Imaging Modes
3. Non-Destructive Imaging
Disadvantages
1. Sample Size Limitations
2. Complexity of Data Interpretation
3. Beam Damage
APPLICATIONS:
• SEM gives useful information on:
1. Topography
2. Morphology
3. Composition
4. Crystallographic information
• Detailed imaging of biological
specimens such as cells, tissues, and
microorganisms.
• Examining trace evidence, such as
fibers, hairs, and gunshot residue, with
high resolution.
THANK YOU
