• Nhà thông minh (Home Automation)

• Thành phố thông minh (Smart city)

• Giám sát chất lượng không khí và tiếng ồn
• Nông nghiệp thông minh
• Nhà máy thông minh
• Thiết bị đeo thông minh hỗ trợ theo dõi sức khỏe
Sensors for IoT
ams at a glance
• Our business
 Focus on high performance sensor solutions
 Sensor solutions, sensor ICs, interfaces, related software
Smart Phones & Tablet Automotive
 Small, low power, highest sensitivity, multi-sensor integration
 Best-in-class solutions for leading OEMs

• Our end markets

 Consumer & Communications (C&C)
 Automotive, Industrial, Medical (AIM)

Wearables Industrial
• By the numbers
 1000+ engineers
 21 design centers, 3 manufacturing locations
 35+ years of design and manufacturing know-how
 9000+ employees worldwide
 8,000+ customers

• Financials Smart Home & Buildings Medical

 Revenues H1 2017 EUR330.8m/$359.1m
 Revenues 2016 EUR549.9m/$608.7m

2
Outline
• ams at a glance
• IoT starts with Technology (HW/SW)
• IoT starts with useful applications The Internet of things (IoT) is the
• IoT needs data security! network of physical devices,
vehicles, home appliances, and
• IoT needs sensors… other items embedded with
• Sensors for Mobiles electronics, software, sensors,
actuators, and network
• Sensors for Wearables connectivity which enable these
• Sensors for Home Automation objects to collect and exchange
data.
• Sensors for Building Automation
• Conclusion / outlook This includes:
Autonomy:
Sense – analyze – initiate actions

3
IoT starts with Technology
• Hardware
 Analog and mixed-signal components
 Connectivity  Each thing is uniquely identifiable & addressable. And is able to sent and receive data.
 Microcontrollers
 Power and energy management
 Sensors
 Actuators
• Software
 The IoT allows objects to be sensed (sensors) or controlled (actuators) remotely
 Analysis of data (at local scale)
 Take informed decisions to take actions
• Data
 Requires standardization:
• Data structure: data type, time + location organization needed
• Communication protocols
• Services Portfolio for IoT applications:
 Analysis of data (at meta / mega
 scale)
Create www statistics for reference
 With help of internet give advise.
• With use of a reference
database

www.st.co 4
 IoT starts with useful applications
• Use Cases – environmental sensors
Mobile and wearable Home Building Automation / Internet of Things

www.ams.com

5
 IoT starts with useful applications
• Everything becomes smart: Transport
 Smart grids / power management smart traffic control, smart parking, electronic toll collection
systems, logistic and fleet management, vehicle control, and
 Smart homes safety and road assistance.
 Smart buildings Medical:
 Intelligent transport e-remote health monitoring and emergency notification
 Smart cities systems. Personal medical advisor. Wearable heart monitors,
vitality sensors. Quantified self, connected health.
 Digital health
Agriculture:
 Smart wearable temperature, rainfall, humidity, wind speed, pest
 Smart environment infestation, soil humus content or nutrients,
Greenhouses: – amount of light + color of light, …
 Smart enterprise
 Smart farming Counter side:
Internet of Shit:
… www.st.co
- No added value:
mInternet of Living Things - e.g. moving display from coffee machine to mobile
phone
Internet of Medical Things - Not working software
Internet of Health Things at Home
Industrial Internet of Things - Not setting up good security standards
Internet of XXXXXX Things. 6
- …
 IoT needs data security!
• IoT and data mining are inherently incompatible with privacy.
 IoT Security Foundation (IoTSF) was launched on 23 September 2015.

• Data security
 IoT companies should ensure that data collection,
storage and processing would be secure at all times.
 Companies should adopt a “defence in depth”
approach and encrypt data at each stage.
 As long as IoT devices & data are on the internet.
Software must be maintained to control it.
• Data permission
 users should have control over their data usage at all
times.
• Data limitation
 Only data that is needed should be collected and
stored for a limited time.

White paper www.ti.com

7
 IoT needs sensors…
• Market trends & technology needs
 Performance
 New/better/more sensing functions Standalone Sensors Integrated Multi-Sensors
 Smarter and/or more autonomous systems
 Through model & logic, ideal & good sensors again TREND
 Self calibration & sensor to sensor corrections
 Low power (battery applications)
 Size and cost:
 Small enough to enable mobility 5 e-senses Smart Sensor Systems

 More and more functions per unit area

 Thinner devices Miniaturization of sensors:
 Bulk properties of classic sensors, replaced by
 Miniaturized, integrated sensors calculating & modelling power of chip.
 Monolithically  Bulk = ideal,
 Wafer stacking (3D integration)  Miniaturization may make sensor less-
 Wafer Level packaging ideal.
 ASIC makes sensor ideal again.
Combined sensors:
 The input of one (T) sensors, helps to improve
the 8
 Sensors for Mobiles
Nr of sensors in a smartphone: Face recognition, finger print, pattern, password, pin, iris scan
2007 2014 2021

www.consumer.huawei.com/nl/ – P10
IR Sensor 1 • Driving forces for market integration:
RGB 1
Laser ranger 1  Sensor price
Gas sensor 1  Value adding applications and use cases
Pressure sensor 1
Relative Humidity 1 1 • Must haves are:
Heart Rate Monitor 1 1  Performance
Fingerprint 1 1
Magnetometer 1 1
• Good sensor, self calibration, reliable
Accelerometer 1 1 1  Small form factor
Proximity 1 1 1  Low power
ALS 1 1 1
CIS 3D - ToF 1 • New trends:
CIS 2D 1 2 3  Smart phone as a HUB for e.g. vitality
Microphone 1 3 4
Temperature 1 1* 1*
sensors to www & cloud databases.
Total = 6 12 20
*) Yole Developpement 2017

9
www.apple.com – iPhone X www.Samsung.com - Galaxy S8
 Sensors for Wearables
• Worn on the body and in contact with the body
 Smart watch,
 wrist band,
 clothes,
 shoes,
www.hexoskin.com

 etc.
• Vitality sensors
• Sensors supporting Personalized Medicine: e.g. PoC

http://medicalfuturist.com/6-
surprising-trends-shaping-the-future-
https://www.amazon.com/Wearable-
of-pharma Apple iWactch3 Fitbit Ionic Samsung Gear Sport 10
Technology
Ambient Light Sensors
• Adjust screen intensity
• Proximity detection to
switch off screen

Dual diodes

11
Light sensor evolution:

12
True color & Multi-spectral sensors
• 6-channel device with various choices of passband filters for different
applications ; SiP or 3D/TSV

Interference Filter options

XYZ-NIR UVAB

6-channel VIS +IR

6-channel VIS
…. and more
Quad Sensor
Analog Front End
LED
Spectral Sensing Engine

Communication/Network UART
Interfaces BLE I/F
/I2C

SPI

PROM

6-channel photosensor AS726x - architecture

6-channel photosensor AS726x - Top view and TSV/WLP bottom view 13

 Mobile and Wearable Solutions
Key Use cases and Value Proposition

In- and outdoor air quality Monitor Fitness & Personal Health

• Improve life quality • Performance report

• Environment Comfort & optimization
Wellbeing awareness • Improved calorie
• Increase personal effectiveness consumption calculation
and sleep quality
• Reduce risks of chronic
diseases
• Personal Safety

Water splash detection GPS enhancement

• Improve waterproof phone • Improve dead reckoning

performance by settings • Low power indoor navigation
optimization in water submersion
(e.g. camera, touch screen, audio)
• Failure prevention or guarantee
voidance

14
Sensors for Home Automation
• Smart Home
 Energy: solar panels, geothermal
heat
• Smart appliances
• Smart lighting
 Presence detection
• Air Quality
www.sensirion.com

• Temperature and comfort

• Healthy Home
 Dust, Particular Matter, gases
• Safe Home
 Intrusion detection
 CO, fire detection
www.st.com 15
 In Home: ‘Bathroom’ automation
• Smart environment
 light intensity & color
 comfort: temperature, humidity
 air quality
• Smart mirror
 Screen, indicates news,
 Body vitality, BMI, etc
• Smart balance
 BMI, trends of …
• Smart tooth brush
 senses mouth
hygiene
• Smart toilet
 as health
monitor
• Smart shower
 eco-friendly
 waste
analysis
16
Sensors for Building Automation
• Energy neutral
 Smart Lighting
• Health environment
 Comfort
 O2 & CO2 levels
 Dust
 gasses

17
White Paper: ams_TA_Internet_of_Awareness_in_Smart_Lighting_Systems_EN
 Relative Humidity
• Operation principles

Parallel plate configuration Interdigital configuration

DRY POLYMER (RH=0%):

polymer

RH > 0%: MTP Memory

SDA
Humidity I2C
Controller
sensor Interface SCL

Temperature
sensor

APB

18
 Gas Sensor: MOx semiconductor
• MOx semiconductor
 Crystalline material
 Porous structure formed by “sintering” metal oxide powder
 Electrical conductivity increases with temperature
 Metal oxides behave as n-type or p-type semiconductors
Sensing
Heater resistance
Membrane

Metal

Oxide

Heater

Semiconductor Example Reducing gas Oxidising gas

Classification Material response (eg CO) response (eg NO2)
n-type SnO2 Reducing resistance Increasing resistance

p-type Cr2O3 Increasing resistance Reducing resistance

19
 Sensor Fusion Software
Compensation Overview
sensor in a
cavity
• Thermal inertia sensor inside the
sensor
Thermal contact with the device phone
reduces the speed of adaptation gas
to changing ambient temperature. molecules
Slow sensing due to Inaccurate sensing due to Slow sensing due to the diffusion /
•Thermal interference There the thermal inertia thermal interference adsorption
are many components
producing heat inside a mobile
device, e.g. display or processor.
The generated heat warms up Temperature measurement inside a mobile phone with sudden T change from 30 °C to 20 ° C
the device and the sensor.

•Diffusion/adsorption/desorption
When the ambient humidity changes,
the diffusion process to the inside of
the device can be slow.
Furthermore, internal components
might adsorb/desorb the
humidity,
e.g. the material of printed circuit
boards.

20
Sensors for Mobile, Wearables, Home & Building Automation
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Mobiles & Wearables
Phone calls, voice recognition X
Photo camera X
Face recognition X X
Screen intensity adjustment X
Proximity measurement X X X
Screen orientation X
Location, GPS X X X X
Environmental information X X X X X
Heart Rate monitor X X X
True color X
Vitality information, Glucose, .. X X X X X X X X X X
Personal Health - Quantified Self X X X X X X X X X X X X X

Home & Building Automation

Temperature & comfort X X
Air Quality X X X X X
Smart Lighting X X X
Security X X X X X X X
Food quality X X X X X X
Health security X X X X X X X X X X

21
Conclusion / outlook
• IoT is an exciting field for sensors!
• Sensors need to be small, low power and low cost
 This requires highly integrated, high volume productions flows
• Sensor process becomes more integrated in CMOS-fabs (4th option)
 CMOS / MEMS fabs become more integrated / adjusted to each other.
• Packaging becomes more integrated
• Design flows as well
• Sensors need to perform well
 System integration software helps to make sensors accurate.
• Multiple sensors provide the inputs
• Number of available Sensors & Applications will expand:
 Health related: vitality, particulate matter, medical sensors

22
Thank you!
 Abstract
Sensing is often the trigger to a number of events. The sensed property is communicated into a system or network,
where analysis is made that eventually results in one or more responding actions. To create meaningful responses,
sensible inputs and analysis need to be derived. This is exactly the playfield of CMOS technologies, where its
computational power can support seemingly complex situations. The Internet of Things, IoT, is one of such
environments where a lot of sensing information is expected to be shared to the benefit of human wellbeing. These
application areas are numerous and hence a few situations will be elucidated for smart buildings and personal info
systems, where internet can play an interesting role.
For many applications the development of IoT often requires sensors at relative cheap prices, while not giving in on
performance and quality. Not the least also small form factors and low power, enabling battery and energy scavenging
use are dreamed off. Also here CMOS technologies are providing the solutions and driving the capabilities. Therefore,
sensors are becoming a 4th option technology in CMOS fabs, besides the current 3: RF, High Voltage and embedded
memories. Together with advanced packaging and test methods, miniaturization and mass production are being
enabled. Design libraries can be developed in classical ways to integrate sensors with sensor interfaces in new ASIC
designs. This enables highly integrated, high performance sensor solutions, well capable to realize many IoT sensor
ideas.
The above will be shown with a few examples in the areas of humidity, temperature, pressure and gas sensing,
biosensors, imaging and several other optical sensor solutions for Mobiles, Wearables and Home and Building
Automation.

24
 Sensor fusion software & sensor inter-dependencies
• Sensor data  user information (sensor fusion)
• Sensor solution = Sensor IC hardware + system integration
software Applications
App
Software
Data
IC

Corrected RH and
Standard

Compensat Services
Compensation Engine CE

T info ion Library parameters

engine T/RH

Combined sensors:
Compensation Engine Manager
Services

OS ENS210

Input of one (T)

Display CPU Sensor X
driver status status driver

Hardware

helps to improve
ENS210 Display CPU Sensor X

the Rel. Humidity (RH) + Temperature

(T) sensor IC Accuracy: ± 0.2C;
other sensor (RH) ±3.5% (3σ) Power<0.02mW

Temperature

Relative humidity

Source: ams
AG 25
 Integrated sensor production • In CMOS / MEMS fabs
Functional Spec Wafer production
Customer
Device Library, DRM Design of,
containing Sensors, containing Sensor-IC,
Device Physics TSV, 3D integration, Lay-out & Package GDS2 Chipfin &
Simulations Packaging + DFM data Mask making

www.comsol.com www.cadence.com www.cadence.com www.intellisense.com Wikipedia - photomask AJ den Boef, Surf. Topogr.: Metrol. Prop. 4 (2016) 023001

Wafer Test
PCM: (Process
Control
Modules)

www.xcerra.com www.hwashu.com.tw

(3D integration of Multiple wafers) Test & Calibration

Diced or Tape & Reel Sensor-IC
Packaging
www.electroglas.com (Wafer Level) Customer
(Wafer
Level)

26
 Test & Calibration of Sensors
• Request to test & handler tools:
 Physical stimuli in handler environment
 NIST traceable
 High accuracy & repeatability
 Test at low cost = high speed
 Small dimensions, incl. CSP dies or
Wafer Level

Absolute Optical & Spectral sensing

Osai Spea Xcerra Cascade 27