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mems ppt
- 1. MEMS TECHNOLOGY BYS.APPA RAO
- 2. MEMS: micro-electro-mechanical systemsCombination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology. INTRODUCTION
- 3. Same as theprocess steps used for making conventional electronic circuits MEMS PROCESS PowerPoint
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- 5. CHEMICAL DEPOSITION Chemicalvapour deposition PHYSICAL DEPOSITION Sputtering DEPOSITION:
- 6. Applicationof photo resist Optical exposure to print an image of the mask onto the resist Immersion in an aqueous developer solution to dissolve the exposed resist LITHIOGRAPHY:
- 7. ETCHING: DRY ETCHING WET ETCHING
- 8. Materials are thebasic things required to develop micro sensors Metals Polymers Ceramic materials Semiconductors Composite materials MATERIALS FOR MEMS:
- 9. Process of shapingsilicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices MICRO MACHINING TECHNOLOGY:
- 10. BULK micromachining: SURFACEmicromachining: LIGA process: TYPES OF MICROMACHINING:
- 11. MEMS ACCELEROMETRER: CONVENTIONAL ACCELEROMETER SENSOR Made of bulky and heavy metal parts Require high operating voltage/current Needs careful maintenance Highly expensive not throwaway type
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- 13. LAYOUT OF THERESISTOR:
- 14. MASKS that areused 4 ACCELEROMETER:
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- 19. Significantly lower manufacturingcosts Small inertial mass Particularly realized in the area of: – sensors – signal switching ADVANTAGES:
- 20. Imprecise fabrication methodsExpensive and complex packaging CAD Design tool inaccuracies TECHNICAL LIMITATIONS:
- 21. Accelerometers in consumerelectronics devices such as game controllers Communications biotechnology APPLICATIONS:
- 22. As with allemerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives. It has the potential to change our daily life as much as computer FUTURE:
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