Basic MOS Device Physics
Two reasons for studying the device physics:
1. In analog circuit, transistors are not considered as simple
switches and many of their second-order effects directly
impact the performance.
2. As new generation of IC technologies scales the devices,
these effects become more significant. Designer must often
decide which effects can be neglected in a given circuit.
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Basic MOS Device Physics
An n-type MOS device:
M: metal (or high doping polysilicon);
O: silicon dioxide (sometimes just call it as oxide);
S: silicon
Gate
Channel area
Source Drain
Simple view of a MOS device
Minimum channel length Leff = 0.18
µm, often represents the technology
nodes;
Oxide thickness tox = 5nm or 50 Å,
often affects the threshold voltage Vt
and thus the power supply.
High doping area for ohmic contact
These two figures play most important
role in technology nodes scaling down.
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Basic MOS Device Physics
NMOS and PMOS devices:
(a) Simple PMOS device; (b) PMOS inside an n-well
When both NMOS and PMOS devices are needed to be placed on one chip, n-well or p-well is
needed.
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Basic MOS Device Physics
NMOS and PMOS devices:
In addition to NMOS and PMOS transistors, the technology provides:
1.) A deep n-well that can be utilized to reduce substrate noise coupling.
2.) A MOS varactor that can serve in VCOs
3.) At least 6 levels of metal that can form many useful structures such as
inductors, capacitors, and transmission lines.
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Basic MOS Device Physics
THE PN JUNCTION: Metallurgical Junction
P-type N-type
P-type N-type
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Basic MOS Device Physics
P-type N-type
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Basic MOS Device Physics
Summary of the Abrupt PN Junction Characterization
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Basic MOS Device Physics
Reverse Breakdown and Leakage Current Characteristics
of the PN Junction
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Basic MOS Device Physics
Graded PN Junction Characterization
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Basic MOS Device Physics
PN Junction Summary
Characterized the reverse bias operation of the abrupt pn junction
• pn junction has a barrier potential ψ0
• Depletion region widths are proportional to N-0.5
• The pn junction depletion region acts like a voltage dependent capacitance
Applications of the reverse biased pn junction
• Isolate transistors from the material they are built in
• Variable capacitors - varactors
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Basic MOS Device Physics
Threshold Voltage (Vth):
The gate voltage that the inversion layer is formed in the channel
Holes are depleted
Full of holes
Electrons
accumulated and
inversion layer
formed
Qdep
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Basic MOS Device Physics
Formation of inversion layer in a PMOSFET:
Similar to NMOSFET, but inversion layer is full of holes and threshold voltage is negative.
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Basic MOS Device Physics
Threshold voltage calculation:
Qdep
VTH =φ MS + 2 φF +
C ox
=φ MS φF (substrate) − φF (gate)
φF : Equilibrium-electrostatic potential (Femi potential)
kT N
φF (N-type) = ln( D )
q ni
kT n
φF (P-type) = ln( i )
q NA
Qdep = 4qε si φF N sub
ε ox
C ox =
tox
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Basic MOS Device Physics
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Basic MOS Device Physics
Due to the complex of the I-V curves, I-V characteristics of a MOSFET are often divided
into two regions: Triode region & Saturation region
1. Triode region
W 1
I D = µ nCox [(VGS − VTH )VDS − VDS ]
2
L 2
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Basic MOS Device Physics
If VDS <<2(VGS – VTH ), device is in deep triode region. In this case, device actives as a
controlled linear resistor. So we also call this region as linear region.
1
Ron =
W ∂I D / ∂VDS
I D = µ nCox [(VGS − VTH )VDS
L 1
=
W
µ nCox (VGS − VTH )
L
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Basic MOS Device Physics
Example:
Assume
µnC ox = 50µ A / V 2
W
= 10
L
VTH = 0.7V
Plot the on-resistance as a function of VG. Note that the drain terminal is open.
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Basic MOS Device Physics
2. Saturation region
It is the pinch-off of the channel that leads to saturation region of the device, at pinch-off point,
Vp≡VGS-VTH. In the simplest model, the pinch-off point displace is neglected. In this case, the
channel can be taken as a resistor with constant resistance Rsat.
The drain current IDS keeps
constant with the increase of
drain voltage VDS
1 W
ID = µ nCox (VGS − VTH ) 2
2 L
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Basic MOS Device Physics
Example:
Plot the transconductance gm as a function of VDS
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Basic MOS Device Physics
MOS device model modification-Second-order effect
Above model is the simplest model of MOS device. It can fit the experiment at old
technology larger than 1µm. When dimension goes into sub micron or deep sub micron ,
second-order effects something like follows must be considered:
1.Body effect
2.Channel-Length modulation
3.Subthreshold conduction
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Basic MOS Device Physics
Second-order effect: body effect
Normally, for NMOS, VB is equal to VS and tied to ground, that is VBS=0.
If sometimes VB is less than VS, then VBS<0.
In this case, VTH will become larger,current is smaller.
VTH= VTH 0 + γ ( 2Φ F + VSB − 2Φ F )
Qdep
VTH 0 = φ MS + 2φF +
C ox
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Basic MOS Device Physics
Example:
Assume
VTH 0 = 0.6V
γ = 0.4V 1 2
2Φ F =0.7V
Plot the drain current if VX varies from -∞ to 0.
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Basic MOS Device Physics
Second-order effect: Channel-Length modulation
In saturation region of simplest model, the
channel length change due to pinch-off
point move is neglected, so that ID can be
dealt with constant value.
If Channel-Length modulation is
considered, the effective channel length is
shorter, ID will increase slightly with the
increase of VDS;
In small-signal analysis, output resistance
ro need to be considered.
1 W
ID = µ nCox (VGS − VTH ) 2 (1 + λVDS )
2 L
λ Is Channel-Length modulation factor
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Basic MOS Device Physics
Second-order effect: Subthreshold conduction
In above simplest model, there is no current when gate voltage is small than threshold
voltage (VGS < VTH).
In fact, the weak inversion layer exists even if VGS < VTH and there exists a
subthreshold current, shown as follow:
VGS
I D = I 0 exp
ξVT
where ξ>1 is a nonideality factor
and VT=kT/q.
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Basic MOS Device Physics
Device layout
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Basic MOS Device Physics
Device layout
Draw the layout of the circuit.
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Device layout
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Device Capacitance
(1) C1=WLCox, oxide capacitance between the gate and the channel
(2) C2 = WL qε si N sub /( 4ΦF ) , Depletion capacitance between channel and substrate
(3) C3 and C4, Capacitance due to the overlap of the gate poly with the source and drain
areas. The overlap capacitance per unit width is denoted by Cov.
(4) C5 and C6, Junction capacitance between the source/drain areas and the substrate, is
usually decomposed into two components: bottom-plate capacitance Cj, per unit area, and
sidewall capacitance Cjsw, per unit length.
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Basic MOS Device Physics
Device Capacitance
The capacitance will change with the change of applied voltage.
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Basic MOS Device Physics
I-V Characteristics describe the large-signal model of MOS
devices and often used in setting the bias of the devices in the
designed circuit (usually related to DC analysis).
Input signals are often small signals (often milivolts), large-
signal model cannot deal with these signals. Therefore, small-
signal model is needed for analysis of the analog circuit (usually
related to AC analysis).
Most of the devices in analog circuit design are set in
saturation region in order to get enough small signal
amplification.
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Basic MOS Device Physics
The low-frequency model can be simplified to several
different forms:
Considering channel-length modulation effect
Considering body effect
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Basic MOS Device Physics
Output resistance: Body effect transconductance:
∂V ∂I D
r0 = DS g mb =
∂I D ∂VBS
1 ∂I D ∂VTH
= =
∂I D / ∂VDS ∂VTH ∂VBS
1 W ∂V
= = µ nCox (VGS − VTH )(− TH )
1 W L ∂VBS
µ nCox (VGS − VTH ) 2 ⋅ λ
2 L γ
= gm
≈
1 2 2Φ F + VSB
λI D = ηg m
Where:
η = g mb / g m
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Basic MOS Device Physics
Mobility of electrons is greatly higher than mobility of holes, therefore NMOS transistors have
higher current drive and transconductance ;
µ p Cox ≈ 0.25µ nCox
Moreover, NMOS transistors exhibit higher output resistance.
It is preferred to use NMOS rather than PMOS wherever possible !!
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Basic MOS Device Physics
Passive Devices - Capacitors
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Basic MOS Device Physics
Passive Devices - Capacitors
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Basic MOS Device Physics
PN Junction Capacitors
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Standard MOS Capacitor (D = S = B)
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Inversion Mode MOS Capacitors
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Inversion Mode MOS Capacitors
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Accumulation Mode MOS Capacitors
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Accumulation Mode MOS Capacitors
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Polysilicon-Oxide-Polysilicon (Poly-Poly):
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Implementation of Capacitors using Available Interconnect Layers
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Horizontal Metal Capacitors
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Passive Devices – Resistors:
Source/Drain Resistor
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Polysilicon Resistor
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N-well Resistor
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Passive Devices - Inductors
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Planar Spiral Inductors
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Planar Spiral Inductors
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Planar Spiral Inductors
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Solenoid Inductors
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Transformers
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Layout-Capacitor
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Layout-Resistor
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